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Publications
  1. Pierluigi Bellutti; Mario Zen; Giovanni Soncini,
    Thicking Effect in Dry/Wet Field Oxidation,
    By using a test structure especially designed for SEM cross sectioning analysis, it has been observed that the growing of Field Oxide in submicron opening is also affected by compressive mechanical stresses induced by the thermal oxide growth under the oxidation mask, i.e. at the bird’s break region. Experimental data show a new effect, i.e. a field oxide thicking phenomenon which developes at 0.7:-1.5 micron opening width. The thicking effect competes with the well known thinning effect and causes a shift on the appearance of the Field Oxide Thinning to narrower mask openings.,
    1995
  2. Giovanni Soncini; Alfredo Maglione; Mario Zen; Pierluigi Bellutti; Nicola Zorzi; Massimo Gottardi,
    Charge Coupled Devices for Imaging,
    COMETT,
    1994
  3. Pierluigi Bellutti; Maurizio Boscardin; Alberto Lui; Giovanni Soncini; Mario Zen; Nicola Zorzi,
    Bird`s Beak Reduction by Dry LOCOS Technique,
    Proceedings of the 22nd International Conference on Microelectronics (MIEL `94) and of the 30th Symposium on Devices and Materials (SD `94),
    1994
    , pp. 127-
    131
    , (Proceedings of the 22nd International Conference on Microelectronics (MIEL `94) and of the 30th Symposium on Devices and Materials (SD `94),
    Terme Zrece-Rogla, Slovenia,
    28/09/1994 - 30/09/1994)
  4. Pierluigi Bellutti; R. Bovo; Maurizio Boscardin; Giovanni Soncini; Mario Zen; Nicola Zorzi,
    Intrinsic Gettering in a CCD/CMOS Process,
    Symposium on High Purity Silicon III,
    1994
    , pp. 634-
    635
    , (Symposium on High Purity Silicon III,
    Miami, USA,
    09/10/1994 - 14/10/1994)
  5. Pierluigi Bellutti; Maurizio Boscardin; Nicola Zorzi; R. Bovo; P. Rossetto; Giovanni Soncini,
    Gettering intrinseco in silicio semiconduttore,
    2° Congresso nazionale sui materiali per Ingegneria - AIMAT 94,
    1994
    , pp. 585-
    592
    , (2° Congresso nazionale sui materiali per Ingegneria - AIMAT 94,
    Trento, Italy,
    19/09/1994 - 21/09/1994)
  6. Pierluigi Bellutti; Maurizio Boscardin; Flavio Giacomozzi; Severino Pedrotti; Mario Zen; Giovanni Soncini,
    Thin film technology in the development of IRST-CCD/CMOS VLSI fabrication process,
    A.I.V.,
    no publisher,
    1993
    , (A.I.V.,
    Bolzano, Italy,
    1970)
  7. Giovanni Soncini; Pierluigi Bellutti; Mario Zen; M.C. Vecchi; Massimo Rudan,
    Development of a CCD/CMOS VLSI Technology Especially Tailored for Smart Optical Sensors,
    Processing and device modelling for microelectroni,
    Elsevier,
    1991
    , pp. 391 -
    404

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