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Sensors and transducers

  • Diffusion
  • Projection lithography: CD 1.5um, accuracy 1um
  • PVD metallization
  • Electroplating
  • Dry etching
  • Wet etching

- Back-end module
- Temperature below 400C
- Ultra low stress dielectric layers
- Capacitive actuation
- Metal and polymer sacrificial layer
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