We can coat 6 inch wafers in thickness range between 300-700um, with single or double side coating of the following:
- Silicon oxide (20-2000nm)
- Polysilicon (100-4000nm)
- Silicon nitride (20-150nm)
- Low stress silicon nitride (10-4000nm)
- Aluminum (20-1200nm)
- Titanium (20-150nm)
- Titanium nitride (20-150nm)
- Chromium (20-300nm)
- Gold (20-300nm)
note: thickness ranges may be extended to meet specific needs.