You are here

MEMS CLASS 100-1000 CLEANROOM (180m2)

  • Diffusion
  • Projection lithography: CD 1.5um, accuracy 1um
  • PVD metallization
  • Electroplating
  • Dry etching
  • Wet etching
Date: 
Friday, 28 June, 2013
Contacts: 
ferrario@fbk.eu
Research topics: