for a complete decsription of our capabilities and equipement list please refer to our brochure.
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Capabilities
All our labs have full 6 inch double side processing capability

Download our brochure:
capabilities 2013

FABRICATION LINE CLASS 10-100 CLEANROOM (560m2)

- Magnetron sputtering Metallization
- Diffusion
- LPCVD
- PECVD
- Projection lithography: CD 2um, accuracy 1um
- Stepping lithography: CD 350nm, accuracy 75nm
- Ion Implantation
- Dry etching
- Wet etching
MEMS CLASS 100-1000 CLEANROOM (180m2)

- Diffusion
- Projection lithography: CD 1.5um, accuracy 1um
- PVD metallization
- Electroplating
- Dry etching
- Wet etching
PACKAGING LABORATORY

- Dicing
- Pick and place
- Wire bonding
TESTING LABORATORY

- Functional Test (man&auto)
- Parametric Test (man&auto)
- Solar cell Test
- Optical device Test
- Prototype Development