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Capabilities

All our labs have full 6 inch double side processing capability

for a complete decsription of our capabilities and equipement list please refer to our brochure.

Download our brochure: PDF icon capabilities 2013
FABRICATION LINE CLASS 10-100 CLEANROOM (560m2)
  • Magnetron sputtering Metallization
  • Diffusion
  • LPCVD
  • PECVD
  • Projection lithography: CD 2um, accuracy 1um
  • Stepping lithography: CD 350nm, accuracy 75nm
  • Ion Implantation
  • Dry etching
  • Wet etching
MEMS CLASS 100-1000 CLEANROOM (180m2)
  • Diffusion
  • Projection lithography: CD 1.5um, accuracy 1um
  • PVD metallization
  • Electroplating
  • Dry etching
  • Wet etching
PACKAGING LABORATORY
  • Dicing
  • Pick and place
  • Wire bonding
TESTING LABORATORY
  • Functional Test (man&auto)
  • Parametric Test (man&auto)
  • Solar cell Test
  • Optical device Test
  • Prototype Development